Chapter 14: Problem 9
Define the segregation coefficient.
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These are the key concepts you need to understand to accurately answer the question.
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Chapter 14: Problem 9
Define the segregation coefficient.
These are the key concepts you need to understand to accurately answer the question.
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Assume that a \(100 \mathrm{~mm}\) diameter GaAs wafer is uniformly implanted with \(100 \mathrm{keV}\) zinc ions for 5 minutes with a constant ion beam current of \(10 \mu \mathrm{A}\). What are the ion dose per unit area and the peak ion concentration?
Assume the measured phosphorus profile can be represented by a Gaussian function with a diffusivity \(D=2.3 \times 10^{-13}\) \(\mathrm{cm}^{2} / \mathrm{s}\). The measured surface concentration is \(1 \times 10^{18}\) atoms/cm \(^{3}\) and the measured junction depth is \(1 \mu \mathrm{m}\) at a substrate concentration of \(1 \times 10^{15}\). Calculate the diffusion time and the total dopant in the diffused layer.
If a \(50 \mathrm{keV}\) boron ion is implanted into the silicon substrate, calculate the damage density. Assume silicon atom density is \(5.02 \times 10^{22}\) atoms/cm \(^{3}\), the silicon displacement energy is \(15 \mathrm{eV}\), the range is \(2.5 \mathrm{~nm}\), and the spacing between silicon lattice planes is \(0.25 \mathrm{~nm}\).
If arsenic is diffused into a thick slice of silicon doped with \(10^{15}\) boron atoms \(/ \mathrm{cm}^{3}\) at a temperature of \(900^{\circ} \mathrm{C}\) for 3 hours, what is the final distribution of arsenic if the surface concentration is held fixed at \(4 \times 10^{18}\) atoms \(/ \mathrm{cm}^{3}\) ? What is the junction depth? Assume \(D \quad D_{0} e^{\frac{E a}{k T}} \times \frac{n}{n_{i}}, D_{0} \quad 45.8 \mathrm{~cm}^{2} / \mathrm{s}, E a \quad 4.05 \mathrm{eV}, x_{j} \quad 1.6 \sqrt{D t}\)
We would like to form \(0.1 \mu \mathrm{m}\) deep, heavily doped junctions for the source and drain regions of a submicron MOSFET. Compare the options that are available to introduce and activate dopant for this application. Which option would you recommend and why?
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