Chapter 14: Problem 8
Explain the meaning of intrinsic and extrinsic diffusion.
Short Answer
Step by step solution
Key Concepts
These are the key concepts you need to understand to accurately answer the question.
/*! This file is auto-generated */ .wp-block-button__link{color:#fff;background-color:#32373c;border-radius:9999px;box-shadow:none;text-decoration:none;padding:calc(.667em + 2px) calc(1.333em + 2px);font-size:1.125em}.wp-block-file__button{background:#32373c;color:#fff;text-decoration:none}
Learning Materials
Features
Discover
Chapter 14: Problem 8
Explain the meaning of intrinsic and extrinsic diffusion.
These are the key concepts you need to understand to accurately answer the question.
All the tools & learning materials you need for study success - in one app.
Get started for free
A silicon \(p-n\) junction is formed by implanting boron ions at \(80 \mathrm{keV}\) through a window in an oxide. If the boron dose is \(2 \times 10^{15} \mathrm{~cm}^{-2}\) and the \(n\)-type substrate concentration is \(10^{15} \mathrm{~cm}^{3}\), find the location of the metallurgical junction.
Assume that a \(100 \mathrm{~mm}\) diameter GaAs wafer is uniformly implanted with \(100 \mathrm{keV}\) zinc ions for 5 minutes with a constant ion beam current of \(10 \mu \mathrm{A}\). What are the ion dose per unit area and the peak ion concentration?
If arsenic is diffused into a thick slice of silicon doped with \(10^{15}\) boron atoms \(/ \mathrm{cm}^{3}\) at a temperature of \(900^{\circ} \mathrm{C}\) for 3 hours, what is the final distribution of arsenic if the surface concentration is held fixed at \(4 \times 10^{18}\) atoms \(/ \mathrm{cm}^{3}\) ? What is the junction depth? Assume \(D \quad D_{0} e^{\frac{E a}{k T}} \times \frac{n}{n_{i}}, D_{0} \quad 45.8 \mathrm{~cm}^{2} / \mathrm{s}, E a \quad 4.05 \mathrm{eV}, x_{j} \quad 1.6 \sqrt{D t}\)
Assume the measured phosphorus profile can be represented by a Gaussian function with a diffusivity \(D=2.3 \times 10^{-13}\) \(\mathrm{cm}^{2} / \mathrm{s}\). The measured surface concentration is \(1 \times 10^{18}\) atoms/cm \(^{3}\) and the measured junction depth is \(1 \mu \mathrm{m}\) at a substrate concentration of \(1 \times 10^{15}\). Calculate the diffusion time and the total dopant in the diffused layer.
Define the segregation coefficient.
What do you think about this solution?
We value your feedback to improve our textbook solutions.