Chapter 15: Problem 20
Why do we need multiple oxide thicknesses for a system-on-a-chip (SOC)?
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These are the key concepts you need to understand to accurately answer the question.
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Chapter 15: Problem 20
Why do we need multiple oxide thicknesses for a system-on-a-chip (SOC)?
These are the key concepts you need to understand to accurately answer the question.
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Why do we use a \(p^{+}\)-polysilicon gate for PMOS?
For a floating-gate nonvolatile memory, the lower insulator has a dielectric constant of 4 and is \(10 \mathrm{~nm}\) thick. The insulator above the floating gate has a dielectric constant of 10 and is \(100 \mathrm{~nm}\) thick. If the current density \(J\) in the lower insulators is given by \(J=\sigma \mathrm{E}\), where \(\sigma=10^{-7} \mathrm{~S} / \mathrm{cm}\), and the current in the other insulator is negligibly small, find the threshold voltage shift of the device caused by a voltage of \(10 \mathrm{~V}\) applied to the control gate for (a) \(0.25 \mu \mathrm{s}\), and (b) a sufficiently long time that \(J\) in the lower insulator becomes negligibly small.
In NMOS processing, the starting material is a \(p\)-type \(10 \Omega\)-cm \(<100>\)-oriented silicon wafer. The source and drain are formed by arsenic implantation of \(10^{16}\) ions \(/ \mathrm{cm}^{2}\) at \(30 \mathrm{keV}\) through a gate oxide of \(25 \mathrm{~nm}\). (a) Estimate the threshold voltage change of the device. (b) Draw the doping profile along a coordinate perpendicular to the surface and passing through the channel region or the source region.
Design a mask set for a \(5 \mathrm{pF}\) MOS capacitor. The oxide thickness is \(30 \mathrm{~nm}\). Assume that the minimum window size is 2 \(\times 10 \mu \mathrm{m}\) and the maximum registration errors are \(2 \mu \mathrm{m}\).
Describe the disadvantages of LOCOS technology and the advantages of shallow- trench isolation technology.
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