Chapter 20: Problem 9
Describe some of the advantages of using flexural bearings in MEMS devices.
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Chapter 20: Problem 9
Describe some of the advantages of using flexural bearings in MEMS devices.
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What is the difference between force-based and displacement-based actuators? Name some microscale actuators of each type.
What is the general tradeoff between sensor footprint and sensor resolution in sensing elements?
What are some of the advantages/disadvantages of piezoelectric actuators vs. shape memory alloys for microscale actuation?
What are some of the major noise sources in piezoresistive and piezoelectric sensor systems?
Why are sliding bearings problematic at the micro/nanoscale?
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